Cross Sections Set and Transport Coefficients for Ar+ Ions in Ar Gas

Abstract

In this work we present a complete cross sections dataset and transport coefficients of Ar+ ions in Ar gas. These data are needed for modeling in numerous applications of technological importance. A Monte Carlo simulation method is applied to accurately calculate transport parameters in hydrodynamic regime. We discuss new data for Ar+ ions in Ar gas where the drift velocity, characteristic energy, flux and bulk values of reduced mobility, rate coefficients, diffusion coefficients and other transport parameters are given as a function of low, moderate and high reduced electric fields E/N (E-electric field strength, N-gas number density). Furthermore, it is shown that the ion energy probability function follows the Maxwellian distribution at low electric fields, whereas at high fields, it deviates significantly.